Krypton-sputtered tantalum films for scalable high-performance quantum devices

Technology

Krypton-Sputtered Tantalum Films For Scalable High-Performance Quantum Devices

By Nature

We are grateful for help on this work from K. Aggarwal on nanofabrication and T. Banerjee on X-ray photoemission spectroscopy. We thank multiple individuals for contributions: Z. L. Parrott, A. P. McFadden and C. R. H. McRae (NIST-Boulder) for sharin ...Read more